Free Bulk Acoustic Resonator
- Free Bulk Acoustic Resonator
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Bei der FBAR-Technologie (engl. (Thin) Film Bulk Acoustic Wave Resonator), die von der Firma Agilent Technologies entwickelt wurde, werden Resonator-Elemente auf einem Silizium-Die implementiert. Die Funktionsweise ist mit der eines Oberflächenwellenfilters (SAW-Filter) vergleichbar, jedoch mit dem Unterschied, dass bei der FBAR-Technik die Ausbreitung der akustischen Wellen im Substrat ("Bulk") erfolgt.
Diese Technologie hat gegenüber den bisherigen Keramik-Resonatoren eine kleinere Einfügedämpfung und ein wesentliches Einsparungspotential in der Größe der Bauteile. Des Weiteren können mit dieser Technik Filter für Frequenzen ab ca. 1 GHz realisiert werden.
Aus dieser Technologie gehen die BAW-Filter hervor.
Siehe auch
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