Free Bulk Acoustic Resonator

Free Bulk Acoustic Resonator

Bei der FBAR-Technologie (engl. (Thin) Film Bulk Acoustic Wave Resonator), die von der Firma Agilent Technologies entwickelt wurde, werden Resonator-Elemente auf einem Silizium-Die implementiert. Die Funktionsweise ist mit der eines Oberflächenwellenfilters (SAW-Filter) vergleichbar, jedoch mit dem Unterschied, dass bei der FBAR-Technik die Ausbreitung der akustischen Wellen im Substrat ("Bulk") erfolgt.

Diese Technologie hat gegenüber den bisherigen Keramik-Resonatoren eine kleinere Einfügedämpfung und ein wesentliches Einsparungspotential in der Größe der Bauteile. Des Weiteren können mit dieser Technik Filter für Frequenzen ab ca. 1 GHz realisiert werden.

Aus dieser Technologie gehen die BAW-Filter hervor.

Siehe auch

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